Thermal Chamber
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United States of America Patent
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N/A
Issued Date -
Oct 20, 2011
app pub date -
Jan 28, 2011
filing date -
Jan 28, 2011
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A process chamber that provides an interior surface and an exterior surface is confined within a containment chamber. Secured to the containment chamber is a collar that communicates with the process chamber. A seal formed between the process chamber and the collar, includes at least an adjustable backing ring encircling the exterior surface of the process chamber, a preload ring secured to the collar, and a sealing structure encircling the process chamber and positioned between the adjustable backing ring and the preload ring. The adjustable backing ring is adjustably secured a predetermined distance from the preload ring, based on a perimeter dimension of the process chamber, to form the seal between the process chamber and the collar.
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