REACTION CHAMBER
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United States of America Patent
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N/A
Issued Date -
Nov 3, 2011
app pub date -
Feb 8, 2010
filing date -
Feb 9, 2009
priority date (Note) -
Abandoned
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Abstract
A reaction chamber for an atomic layer deposition reactor is provided. The reaction chamber includes outer walls for providing a reaction space inside the reaction chamber. At least one of the outer walls of the reaction chamber is made from a flexible thinsheet.
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