METAL-INSULATOR-METAL CAPACITOR AND METHOD FOR FABRICATING METAL-INSULATOR-METAL CAPACITOR STRUCTURES
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Nov 17, 2011
app pub date -
May 17, 2010
filing date -
May 17, 2010
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A Metal-Insulator-Metal Capacitor and Method for Fabricating Metal-Insulator-Metal Capacitor Structures. The MIM (Metal insulator Metal) capacitor structure comprising a Capacitor Top Metal (CTM); a dielectric; and a Capacitor Bottom Metal (CBM); said CTM comprising an etch stop portion; a conductivity portion having a lower resistivity compared to the etch stop portion; and an interface portion of a different material from the conductivity portion; wherein the conductivity portion is sandwiched between the etch stop portion and the interface portion; and the interface portion interfaces the CTM with the dielectric.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully