Importance

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Abstract

A microscope system is constructed by a light guiding optical system 20 having an objective lens 21 and beam splitters 27a and 27b for splitting an optical image of a sample S, a photodetector 31 for acquiring an image of the sample S, and two CCD cameras 33 and 34 for focus control disposed on optical paths split by the beam splitters 27a and 27b. The cameras 33 and 34 are disposed being inclined with respect to the optical path so that the optical paths thereof in the light guiding optical system 20 vary along a z-axis direction in opposite directions to each other. Images acquired by these cameras 33 and 34 are analyzed in a focus controller 37, and the image pickup focal point to the sample S is controlled on the basis of the analysis result, whereby the focus control when an image of the sample is acquired can be suitably performed.

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First Claim