Outside Air Shut-Off Container and Pressure-Reducible Processing Apparatus
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United States of America Patent
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Issued Date -
Dec 15, 2011
app pub date -
Jun 6, 2011
filing date -
Jun 9, 2010
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Abstract
Because an O-ring of synthetic resin is pyrolyzed in the atmosphere at a high temperature of 150° C. or more, the airtightness cannot be maintained. In an outside air shut-off container according to the present invention, an inert gas is supplied between an O-ring, which hermetically seals a process chamber and a cover member, and the outside air while a gas passage formed between the O-ring and the outside air is covered with a sealing cover. Additionally, an aluminum oxide layer is formed on a contact surface of the O-ring to increase the pyrolysis temperature of the O-ring.
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