Surrounding gate transistor (SGT) structure

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United States of America Patent

PATENT NO 9153697
APP PUB NO 20110303973A1
SERIAL NO

13116506

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Abstract

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The semiconductor device according to the present invention is an nMOS SGT and is composed of a first n+ type silicon layer, a first gate electrode containing metal and a second n+ type silicon layer arranged on the surface of a first columnar silicon layer positioned vertically on a first planar silicon layer. Furthermore, a first insulating film is positioned between the first gate electrode and the first planar silicon layer, and a second insulating film is positioned on the top surface of the first gate electrode. In addition, the first gate electrode containing metal is surrounded by the first n+ type silicon layer, the second n+ type silicon layer, the first insulating film and the second insulating film.

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Patent Owner(s)

Patent OwnerAddress
UNISANTIS ELECTRONICS SINGAPORE PTE LTDSINGAPORE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arai, Shintaro Tokyo, JP 51 1385
Bliznetsov, Vladimir Singapore, SG 8 205
Buddharaju, Kavitha Devi Singapore, SG 9 346
Chen, Zhixian Singapore, SG 19 243
Chui, King-Jien Tokyo, JP 5 194
Jiang, Yu Tokyo, JP 158 903
Kudo, Tomohiko Tokyo, JP 25 597
Li, Xiang Singapore, SG 1551 13938
Li, Yisuo Tokyo, JP 27 310
Masuoka, Fujio Tokyo, JP 412 6771
Nakamura, Hiroki Tokyo, JP 382 4527
Shen, Nansheng Singapore, SG 9 238
Singh, Navab Singapore, SG 26 989

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