Chemical bath deposition apparatuses and fabrication methods for chemical compound thin films
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United States of America Patent
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Apr 1, 2014
Grant Date -
Dec 29, 2011
app pub date -
Sep 24, 2010
filing date -
Jun 23, 2010
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Abstract
Chemical bath deposition (CBD) apparatuses and fabrication methods for compound thin films are presented. A chemical bath deposition apparatus includes a chemical bath reaction container, a substrate chuck for fixing a substrate arranged face-down toward the bottom of the chemical bath reaction container, multiple solution containers connecting to a reaction solution mixer and further connection to the chemical bath reaction container, and a temperature control system including a first heater controlling the temperature of the chemical bath reaction container, a second heater controlling the temperature of the substrate chuck, and a third heater controlling the temperature of the multiple solution containers.
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