SEMICONDUCTOR CHIP MANUFACTURING METHOD

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United States of America Patent

APP PUB NO 20120009763A1
SERIAL NO

13105244

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method for manufacturing semiconductor chips from a semiconductor wafer, including the steps of: a) arranging the wafer on a surface of an elastic film stretched on a first support frame having dimensions much greater than the wafer dimensions, so that, in top view, a ring-shaped film portion separates this outer contour from the inner contour of the frame; b) performing manufacturing operations by using equipment capable of receiving the first frame; c) arranging, on the ring-shaped film portion, a second frame of outer dimensions smaller than the inner dimensions of the first frame; d) cutting the film between the outer contour of the second frame and the inner contour of the first frame and removing the first frame; and e) performing manufacturing operations by using equipment capable of receiving the second frame.

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Patent Owner(s)

Patent OwnerAddress
STMICROELECRONICS (TOURS) SAS16 RUE PIERRE ET MARIE CURIE TOURS 37100

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jarry, Vincent la Membrolle Sur Choisille, FR 15 31

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