Substrate cleaning apparatus, coating and developing apparatus having the same and substrate cleaning method
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United States of America Patent
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Oct 1, 2013
Grant Date -
Jan 19, 2012
app pub date -
Jul 13, 2011
filing date -
Jul 14, 2010
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A substrate cleaning apparatus includes a substrate holding and rotating unit for holding a center of a rear surface of a substrate and rotating the substrate; a cleaning unit including a first cleaning member, a second cleaning member provided around the first cleaning member and a base to which the first and second cleaning members are secured; an elevating unit for moving the substrate holding and rotating unit and the cleaning unit relative to each other so as to allow the first and second cleaning members to come into contact with the rear surface of the substrate held by the substrate holding and rotating unit; and a driving unit for driving the substrate and the cleaning unit relative to each other in a direction along the rear surface of the substrate so as to allow part of the second cleaning member to be exposed to the outside of the substrate.
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