Alumina layer with enhanced texture

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United States of America Patent

SERIAL NO

13135339

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Abstract

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layers is deposited in a temperature range of 750-1000° C. The texture is controlled by a specific nucleation procedure combined with the use of sulphur- and fluorine containing dopants.

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Patent Owner(s)

Patent OwnerAddress
SECO TOOLS AB737 82 FAGERSTA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ruppi, Sakari Fagersta, SE 42 553

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