Manufacturing method of semiconductor device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9263304
APP PUB NO 20120017948A1
SERIAL NO

13186458

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Abstract

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Suppressed is damage of a semiconductor wafer due to charging of a cleaning liquid used in a single wafer type wafer cleaning step.

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Patent Owner(s)

Patent OwnerAddress
RENESAS ELECTRONICS CORPORATIONTOKYO 135-0061

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Anabuki, Kazutoshi Kanagawa, JP 4 4
Kanamitsu, Kenji Kanagawa, JP 20 93
Koga, Takuya Kanagawa, JP 5 4

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