Showerhead
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United States of America Patent
Stats
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N/A
Issued Date -
Feb 2, 2012
app pub date -
Jul 29, 2010
filing date -
Jul 29, 2010
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A showerhead is disclosed in this invention. The showerhead includes a bottom plate, a channel plate, and a top plate. The bottom plate includes a plurality of cooling channels and a plurality of gas holes, wherein the gas holes includes at least one first gas hole and at least one second gas hole. The channel plate includes a first trench area and a second trench area, wherein the first gas hole is connected with the first trench area, and the second gas hole is connected with the second trench area. The top plate is coupled to the channel plate.
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