Conductive film removal agent and conductive film removal method
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United States of America Patent
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Dec 31, 2013
Grant Date -
Feb 9, 2012
app pub date -
Mar 25, 2010
filing date -
Mar 30, 2009
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Disclosed is an agent for removing a conductive film, which contains: an acid having a boiling point of 80° C. or higher, a base having a boiling point of 80° C. or higher, or a compound which generates an acid or a base by external energy in combination with a solvent, a resin, and a leveling agent. Also disclosed is a method for removing a conducting film, which uses the agent for removing a conductive film. The agent for removing a conductive film and the method for removing a conductive film are capable of in-place uniformity removing a desired portion of a conductive film.
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