Distributed multi-zone plasma source systems, methods and apparatus

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United States of America Patent

PATENT NO 9155181
APP PUB NO 20120034394A1
SERIAL NO

12852352

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Abstract

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A plasma source includes a ring plasma chamber, a primary winding around an exterior of the ring plasma chamber and multiple ferrites, wherein the ring plasma chamber passes through each of the ferrites. A system and method for generating a plasma are also described.

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Patent Owner(s)

  • LAM RESEARCH CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Benzerrouk, Souheil Hudson, US 18 929
Cowe, Andrew Andover, US 15 817
Entley, William R Wakefield, US 9 551
Gottscho, Richard Dublin, US 16 1073
Nagarkatti, Siddharth P Acton, US 25 2022
Shajii, Ali Weston, US 84 3115

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