METHOD, APPARATUS AND SYSTEM OF MANUFACTURING SOLAR CELL
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United States of America Patent
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Oct 21, 2011
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May 11, 2007
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Abstract
A method of manufacturing a crystalline silicon solar cell includes steps of preparing a crystalline silicon substrate, texturing the substrate using plasma to form uneven patterns for increasing light absorption, doping ions in the substrate using plasma to form a doping layer for a PN junction, heating the substrate to activate the doped ions, forming an antireflection film on the doping layer, and forming front and back electrodes on front and back surfaces of the substrate, respectively.
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