UNIFORMITY CONTROL USING ION BEAM BLOCKERS
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United States of America Patent
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Issued Date -
Mar 8, 2012
app pub date -
Sep 8, 2010
filing date -
Sep 8, 2010
priority date (Note) -
Abandoned
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Abstract
An ion beam is generated and the energy of this ion beam is changed from a first energy to a second energy through, for example, acceleration or deceleration. A portion of the ion beam is blocked after the energy is changed and the ion beam is implanted into a workpiece. A plurality of blockers may be used to block the beam. Each blocker may be attached to a drive unit configured to translate one of the blockers in a first direction.
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