METHOD FOR FORMING CONDUCTIVE VIA IN A SUBSTRATE

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United States of America Patent

APP PUB NO 20120064230A1
SERIAL NO

12880168

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The steps of the present invention are as follows: (a) a detachable film is formed on both sides of a substrate, respectively; (b) a number of vias running through both sides of the detachable films are formed in the substrate; (c) the vias are filled with a conductive paste; (d) the detachable films are peeled off; (e) a metallic conductive layer is deposited on both sides of the substrate, respectively; (f) a specific mold pattern is formed on the metallic conductive layers, respectively, by a photolithographic process; (g) a metallic circuit layout layer is formed on the patterns, respectively, by an electrochemical process; and (h) the mold patterns and the metallic conductive layers are removed. As such, the substrate is not contaminated by the conductive paste. Further, by using deposition, metallic conductive layers are directly adhered to the substrate and, by using photolithography, layouts with small linewidth could be formed.

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Patent Owner(s)

Patent OwnerAddress
VIKING TECH CORPORATIONNO 70 GUANGFU N RD HUKOU TOWNSHIP HSINCHU COUNTY 303

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ho, Chien-Hung Yonghe City, TW 31 254
Hsiao, Sheng-Li Yonghe City, TW 4 12
Liu, Hsiao-Chun Yonghe City, TW 3 16
Wei, Shih-Long Yonghe City, TW 19 30

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