Carrier for a Silicon Block and Method for Producing Such a Carrier and Arrangement
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United States of America Patent
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app pub date -
Nov 21, 2011
filing date -
May 22, 2009
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Abandoned
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Abstract
A silicon block is firmly connected to a carrier for being moved together for further working by sawing, cleaning or the like. The carrier consists of plastic, for example of glass-fibre-reinforced plastic, and has in its interior a number of continuous longitudinal channels. These longitudinal channels are sawn into, and so cleaning fluid can then be introduced into the intermediate space between the sawn-up wafers in order to flush out sawing remains.
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