CLEANING LIQUID AND CLEANING METHOD
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United States of America Patent
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Issued Date -
Mar 15, 2012
app pub date -
May 21, 2009
filing date -
May 21, 2009
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Disclosed is a cleaning liquid which is capable of cleaning an object to be cleaned, to the surface of which cerium oxide adheres, by dissolving and removing cerium oxide in the form of cerium ions. A cleaning method using the cleaning liquid is also disclosed. The cleaning liquid for removing cerium oxide is characterized by containing hydrogen fluoride, at least one acid selected from the group consisting of hydrochloric acid, nitric acid, sulfuric acid, acetic acid, phosphoric acid, iodic acid and hydrobromic acid, and water. The cleaning liquid is also characterized by dissolving and removing cerium oxide in the form of cerium ions.
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