A Lateral Transfer System
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United States of America Patent
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N/A
Issued Date -
Mar 22, 2012
app pub date -
Mar 1, 2011
filing date -
Mar 1, 2010
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A modular lateral transfer system for use in a horizontally oriented processing chamber is provided. Each module has the ability to deliver process gas in addition to moving the reactant material through the horizontally oriented processing chamber. The modular design enables the operator to remove and replace a module of the system, thereby substantially minimizing the downtime of the chamber required during servicing.
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