Apparatus with photodiode region in multiple epitaxial layers

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United States of America Patent

PATENT NO 8604529
APP PUB NO 20120080719A1
SERIAL NO

13315865

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A CMOS image sensor includes a substrate including silicon, a silicon germanium (SiGe) epitaxial layer formed over the substrate, the SiGe epitaxial layer formed through epitaxial growth and doped with a predetermined concentration level of impurities, an undoped silicon epitaxial layer formed over the SiGe epitaxial layer by epitaxial growth, and a photodiode region formed from a top surface of the undoped silicon epitaxial layer to a predetermined depth in the SiGe epitaxial layer.

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Patent Owner(s)

Patent OwnerAddress
INTELLECTUAL VENTURES II LLC2711 CENTERVILLE RD SUITE 400 WILMINGTON DE 19808

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cha, Han-Seob Chungcheongbuk-do, KR 11 40

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