Optical device, a method of manufacturing optical device, and exposure apparatus
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United States of America Patent
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Jul 22, 2014
Grant Date -
Apr 5, 2012
app pub date -
Aug 9, 2011
filing date -
Sep 30, 2010
priority date (Note) -
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Abstract
The ferroelectric substrate 11 of ferroelectric crystals, while being supported by the support plate 14 which is thicker than the ferroelectric substrate 11, is integrated with the support plate 14 by letting the junction 13 mediate between one major surface S1A of the ferroelectric substrate 11 and one major surface S1B of the support plate 14, and therefore, it is possible through the flat surface polishing to perform thinning of the ferroelectric substrate 11, namely, the ferroelectric crystals, and as a result, it is possible to obtain the thin periodically poled structure. By the voltage application method, the domain inverted region is formed in the ferroelectric substrate 11 which is made thin.
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