SYSTEM AND METHOD FOR LASER PROCESSING AT NON-CONSTANT VELOCITIES

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United States of America Patent

SERIAL NO

13303327

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Abstract

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A method is disclosed for on-the-fly processing at least one structure of a group of structures with a pulsed laser output, The method includes the steps of relatively positioning the group of structures and the pulsed laser output axis with non-constant velocity, and applying the pulsed laser output to the at least one structure of the group of structures during the step of relatively positioning the group of structures and the pulsed laser output axis with non-constant velocity.

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Patent Owner(s)

Patent OwnerAddress
ELECTRO SCIENTIFIC INDUSTRIES INC13900 NW SCIENCE PARK DRIVE PORTLAND OR 97229

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gu, Bo North Andover, US 35 764
Johnson, Shepard D Andover, US 33 1079

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