Substrate Processing System with Multiple Processing Devices Deployed in Shared Ambient Environment and Associated Methods
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United States of America Patent
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Issued Date -
Apr 12, 2012
app pub date -
Oct 6, 2010
filing date -
Oct 6, 2010
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A plurality of substrate processing devices are disposed in a separated manner within a shared ambient environment. A conveyance device is disposed within the shared ambient environment and is defined to move a substrate through and between each of the substrate processing devices in a continuous manner. Some substrate processing devices are defined to perform dry substrate processing operations in which an energized reactive environment is created in exposure to the substrate in an absence of liquid material. Some substrate processing devices are defined to perform wet substrate processing operations in which at least one material in a liquid state is applied to the substrate. In one embodiment, a complementary pair of dry and wet substrate processing devices are disposed in the shared ambient environment in a sequential manner relative to movement of the substrate by the conveyance device.
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