NANOIMPRINT METHOD
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Apr 19, 2012
app pub date -
Sep 9, 2011
filing date -
Oct 19, 2010
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
According to one embodiment, a nanoimprint method includes: performing imprinting by use of a first template, to form a pattern on a first substrate to be transferred; measuring an alignment deviation of the pattern with respect to the first substrate to be transferred; performing alignment-deviation correction based on the measured alignment deviation, to produce a third template by use of the first template; and performing imprinting by use of the third template, to form a pattern on a second substrate to be transferred.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully