Deposition of Material to Form a Coating
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United States of America Patent
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N/A
Issued Date -
Apr 26, 2012
app pub date -
Jul 22, 2009
filing date -
Aug 27, 2008
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
The invention relates to apparatus and a method which allows the creation and maintenance of a closed field system in which magnetrons and/or magnet assemblies are provided in a form to create a magnetic field around an area in which the substrate to be coated is located. The method also relates to the steps of cleaning the substrates and applying an adhesive layer prior to the material which is to form the coating.
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Cited Art Landscape
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