Tube target

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United States of America Patent

PATENT NO 9080236
SERIAL NO

13145681

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Abstract

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The invention relates to a tube target (50) for sputtering, with a target (46) disposed on a cylindrical carrier tube. This target (46) is divided into several segments. The target (46) includes at least one groove (51-54) extending obliquely with respect to its rotational axis.

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Patent Owner(s)

Patent OwnerAddress
PROTECH MATERIALS INC20919 CABOT BLVD HAYWARD CA 94545

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Wurczinger, Dieter Bad Vilbel, DE 3 44

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