METHOD AND APPARATUS FOR PLASMA INDUCED COATING AT LOW PRESSURE
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United States of America Patent
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Issued Date -
May 31, 2012
app pub date -
Oct 28, 2011
filing date -
Nov 30, 2010
priority date (Note) -
Abandoned
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Abstract
The invention provides a method for plasma coating at low pressure with a water and oil repellent polymer layer. The method comprises the steps of:
- providing a substrate with a surface,vaporizing a compound comprising 1H, 1H, 2H, 2H-Perflourodecyl acrylate into a stream of inert gas,maintaining a constant temperature in the compound during the evaporation into the gas,exposing said surface to the mixture of gas and compound,exposing said surface to a continuous plasma generated in the gas and compound mixture, having a plasma power provided by a plasma circuit.
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