Wafer inspection system
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
May 31, 2012
app pub date -
Mar 9, 2011
filing date -
Nov 30, 2010
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A wafer inspection system for inspecting a wafer comprises a platform, a probe card, a illuminator, a test server, at least one image processing device, a control circuit board, at least a test circuit board, a load board connected to the control circuit board and the at least a test circuit board, at least an image card, and at least a relay board. The probe card includes an opening hole and a plurality of probes for contacting the wafer to transmit and receive electrical signals. The illuminator illuminates on the wafer through the opening hole. The test server is controlled to execute test procedure and data process. The test circuit board transmits test signals and performs a determination on the received result signals. The relay board is connected to the probe card and the load board for switching the direction of data flow.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully