MEMS-BASED OPTICAL IMAGE SCANNING APPARATUS, METHODS, AND SYSTEMS
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United States of America Patent
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Issued Date -
Jun 7, 2012
app pub date -
Aug 26, 2010
filing date -
Sep 3, 2009
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Disclosed are MEMS-based optical image scanners and methods for imaging using the same. According to one embodiment, a 3-D scanner for endoscopic imaging is provided, which includes a MEMS mirror for 1-D or 2-D lateral scanning and a MEMS lens for scanning along the optical axis to control the focal depth. The MEMS lens can be a microlens bonded to a MEMS holder. Both the MEMS holder and the MEMS mirror can be electrothermally actuated. A single-mode fiber can be used for both delivering the light to and receiving the returning light from an object being examined.
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