US Patent Application No: 2012/0145,672

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PROCESS FOR SELECTIVELY REMOVING NITRIDE FROM SUBSTRATES

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Abstract

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A method of selectively removing silicon nitride from a substrate comprises providing a substrate having silicon nitride on a surface thereof; and dispensing phosphoric acid and sulfuric acid onto the surface of the substrate as a mixed acid liquid stream at a temperature greater than about 150° C. In this method, water is added to a liquid solution of the mixed acid liquid stream as or after the liquid solution of the mixed acid liquid stream passes through a nozzle.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
TEL FSI, INC.CHASKA, MN42

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Becker, David Scott Excelsior, MN 5 32
Butterbaugh, Jeffery W Eden Prairie, MN 17 330
Ratkovich, Anthony S - 2 1

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Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (1)
8,871,108 Process for removing carbon material from substrates 0 2013