POLISHING COMPOSITION

United States of America Patent

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app pub date
Feb 28, 2012
filing date
Dec 28, 2007

priority date (Note)
Abandoned

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Abstract

To provide a polishing composition which can satisfy both suppression of the surface topography and a high stock removal rate, in a polishing step in the production of a wiring structure.

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Patent Owner(s)

Patent Owner	Address
FUJIMI INCORPORATED	1-1 CHIRYO 2-CHOME NISHIBIWAJIMA-CHO KIYOSU-SHI AICHI 452-8502

International Classification(s)

C09K:MATERIALS FOR APPLICATIONS NOT OTHERWISE PROVIDED ....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
HIRANO, Tatsuhiko	Kiyosu-shi, JP	23	224
Mizuno, Hiroshi	Kiyosu-shi, JP	277	2827
Umeda, Takahiro	Kiyosu-shi, JP	30	129

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POLISHING COMPOSITION

Number of patents in Portfolio can not be more than 2000

United States of America Patent

13407633

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13407633

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