INTEGRATED OPTICAL DEVICE INCLUDING SUBSTRATES STACKED ALONG AN OPTICAL AXIS THEREOF
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United States of America Patent
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N/A
Issued Date -
Jun 21, 2012
app pub date -
Oct 31, 2011
filing date -
Oct 14, 1999
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
An optical device includes a first substrate having a first top surface and a first bottom surface, a second substrate having a second top surface and a second bottom surface, and a spacer substrate between substantially planar portions of the second top surface and the first bottom surface. The spacer, first, and second substrates seal an interior space between the second top surface of the second substrate and the first bottom surface of the first substrate. At least two of the first, second, and spacer substrates are aligned and secured on a wafer level. An optoelectronic element is within the interior space. An optical axis of the optical device extends through one of the first top and bottom surfaces and the second top and bottom surfaces. An electrical interconnection extends from the optoelectronic element to outside the interior space.
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