Water-soluble cutting fluid for slicing silicon ingots

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United States of America Patent

PATENT NO 9522481
APP PUB NO 20120156123A1
SERIAL NO

13392091

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Abstract

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A water-soluble cutting fluid for slicing silicon ingots is characterized in that it includes a monoprotic or diprotic aliphatic carboxylic acid (A) having a carbon number (including the carbon in the carbonyl group) of 4˜10, and either a polyprotic organic acid (B) with ΔpKa of 0.9˜2.3 as defined by the following formula (1) or a salt (BA) of said organic acid (B) as essential components:

description='In-line Formulae' end='lead'ΔpKa=(pKa2)−(pKa1)  (1)description='In-line Formulae' end='tail'

    wherein the dissociation stage, at which the organic acid (B) denoted as n-protic acid HnA, becomes Hn-1A+H+ is numbered 1 with an acid dissociation constant expressed as pKa1, and the dissociation stage at which the organic acid (B) becomes Hn-2A+H+ is numbered as 2 with an acid dissociation constant expressed as pKa2.

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Patent Owner(s)

  • SANYO CHEMICAL INDUSTRIES, LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hidaka, Aki Miyazaki, JP 1 2
Katsukawa, Yoshitaka Kyoto, JP 6 32
Okamoto, Tsuyoshi Kyoto, JP 24 133

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