APPARATUS AND METHOD FOR TRANSFERRING A SUBSTRATE
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United States of America Patent
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Issued Date -
Jul 5, 2012
app pub date -
Jan 4, 2012
filing date -
Jan 5, 2011
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A substrate transfer apparatus includes upper and lower substrate support systems configured to support a substrate at upper and lower support levels, respectively, within a process chamber. A substrate elevator system is configured to move the substrate between the upper and lower support levels. A transfer robot for transferring substrates into and out of the process chamber, a loadlock chamber and methods of transferring substrates are also disclosed.
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