Optical device, exposure apparatus and laser apparatus
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United States of America Patent
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Jul 8, 2014
Grant Date -
Jul 19, 2012
app pub date -
Jan 12, 2012
filing date -
Jan 14, 2011
priority date (Note) -
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Abstract
As a spatial light modulator 35 is disposed between a wavelength conversion part 315 and an exit surface 311b in a ferroelectric crystal substrate 31, only zeroth-order light which is at a particular wavelength is guided to a substrate while laser light from the wavelength conversion part 315 is being modulated, whereby a pattern corresponding to LSI data is drawn. Further, the spatial light modulator 35 is disposed together with the wavelength conversion parts 314 and 315 inside the ferroelectric crystal substrate 31.
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