GRAPHENE-BASED STRUCTURE, METHOD OF SUSPENDING GRAPHENE MEMBRANE, AND METHOD OF DEPOSITING MATERIAL ONTO GRAPHENE MEMBRANE
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United States of America Patent
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Issued Date -
Jul 19, 2012
app pub date -
Mar 14, 2012
filing date -
Mar 24, 2008
priority date (Note) -
Abandoned
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Abstract
An embodiment of a method of suspending a graphene membrane on a support structure includes attaching graphene to a substrate. A pre-fabricated support structure having the gap is attached to the graphene. The graphene and the pre-fabricated support structure are then separated from the substrate which leaves the graphene membrane suspended on the pre-fabricated support structure. An embodiment of a method of depositing material includes placing a support structure having a suspended graphene membrane under vacuum. A precursor is adsorbed to a surface of the graphene membrane. A portion of the graphene membrane is exposed to a focused electron beam which deposits a material from the precursor onto the graphene membrane. An embodiment of a graphene-based structure includes a support structure having a gap, a graphene membrane suspended across the gap, and a material deposited in a pattern on the graphene membrane.
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