US Patent Application No: 2012/0186,354

Number of patents in Portfolio can not be more than 2000

CAPACITANCE TYPE PRESSURE SENSOR AND METHOD FOR MANUFACTURING A CAPACITANCE TYPE PRESSURE SENSOR

ALSO PUBLISHED AS: 8601879

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A capacitance type pressure sensor includes a semiconductor substrate having a reference pressure compartment formed therein, a diaphragm formed of a portion of the semiconductor substrate and formed in a surface layer portion of the semiconductor substrate to define the reference pressure compartment, the diaphragm having a through-hole communicating with the reference pressure compartment, fillers arranged within the through-hole, and an isolation insulating layer surrounding the diaphragm to isolate the diaphragm from the remaining portion of the semiconductor substrate.

Loading the Abstract Image... loading....

First Claim

See full text

all claims..

Related Publications

Loading Related Publications... loading....

Patent Owner(s)

Patent OwnerAddressTotal Patents
ROHM CO., LTD.KYOTO3181

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
OKADA, Mizuho - 20 15

Patent Citation Ranking

Forward Cite Landscape

  • No Forward Cites to Display

Full Text

 
loading....