US Patent Application No: 2012/0187,278

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MICROCHANNEL PLATE AND ITS MANUFACTURING METHOD

ALSO PUBLISHED AS: 8729447

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Abstract

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A microchannel plate (1) having an array of channels (5),includes a substrate (2) and, deposited on the substrate, a hydrogenated amorphous silicon film (3) having a thickness ranging between 50 μm and 200 μm, preferably between 80 μm and 120 μm, the film including the array of channels (5). Preferably, the substrate (2) is an integrated circuit having an internal electronic readout circuit and pixilated collection electrodes (8), and the film (3) is integrated on the substrate (2). The channels (5) may be formed by a Deep Reactive Ion Etching (DRIE) process.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNELAUSANNE217

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jarron, Pierre Saint Julien en Genevois, FR 6 21
Wyrsch, Nicolas - 2 0

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