Integration of structurally-stable isolated capacitive micromachined ultrasonic transducer (CMUT) array cells and array elements
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United States of America Patent
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Oct 22, 2013
Grant Date -
Jul 26, 2012
app pub date -
Mar 13, 2012
filing date -
Oct 2, 2009
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Abstract
A method for forming a capacitive micromachined ultrasonic transducer (CMUT) includes forming multiple CMUT elements in a first semiconductor-on-insulator (SOI) structure. Each CMUT element includes multiple CMUT cells. The first SOI structure includes a first handle wafer, a first buried layer, and a first active layer. The method also includes forming a membrane over the CMUT elements and forming electrical contacts through the first handle wafer and the first buried layer. The electrical contacts are in electrical connection with the CMUT elements. The membrane could be formed by bonding a second SOI structure to the first SOI structure, where the second SOI structure includes a second handle wafer, a second buried layer, and a second active layer. The second handle wafer and the second buried layer can be removed, and the membrane includes the second active layer.
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