Apparatus, optical assembly, method for inspection or measurement of an object and method for manufacturing a structure

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United States of America Patent

PATENT NO 9625368
SERIAL NO

13281393

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Abstract

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An optical assembly for a system for inspecting or measuring of an object is provided that is configured to move as a unit with a system, as the system is pointed at a target, and eliminates the need for a large scanning (pointing) mirror that is moveable relative to other parts of the system. The optical assembly comprises catadioptric optics configured to fold the optical path of the pointing beam and measurement beam that are being directed through the outlet of the system, to compress the size of the optical assembly.

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Patent Owner(s)

  • NIKON CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cooper, Alexander Belmont, US 33 504
Goodwin, Eric Peter Tucson, US 59 407
Pharand, Michel Los Gatos, US 23 203
Robertson, Alec Palo Alto, US 7 101
Smith, Daniel Gene Tucson, US 56 183
Stamper, Brian L Tucson, US 6 77
Williamson, David Michael Tucson, US 11 72

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