METHOD FOR COATING INTERNAL MEMBER HAVING HOLES IN VACUUM PROCESSING APPARATUS AND THE INTERNAL MEMBER HAVING HOLES COATED BY USING THE COATING METHOD
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
N/A
app pub date -
Mar 26, 2012
filing date -
Sep 20, 2002
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A coating method for an internal member of a vacuum processing apparatus is provided. The method includes a process (A) of filling small holes 78 of the internal member 81 with padding plugs 20 each of which has a core member 22 made from a metal material and a metal-resin composite layer 24 covering the circumferential surface of the core member 22, a process (B) of forming the ceramic coating film 80 on the surface of the internal member 81 by plasma spraying after the process (A), and a process (C) of extracting the padding plugs 20 after the process (B). This coating method solves various problems in filling the holes with the pudding plugs, so that a coating film superior in quality and performance can be produced effectively.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully