Importance

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Abstract

Provided is a linear motor actuator capable of eliminating an influence to be exerted onto linear guides (3) due to heat generated by a coil unit (50), sufficiently securing moving accuracy and positioning accuracy of a table plate (4) supported by the linear guides (3), and in addition, maintaining the accuracies over a long period of time. The linear motor actuator includes: a base plate (2) to be fixed to another mechanical apparatus; a plurality of linear guides (3) disposed parallel to each other on the base plate (2); a table plate (4), which is supported by the plurality of linear guides (3) and freely reciprocates above the base plate (2); a magnet unit (51) provided on the table plate (4); and a coil unit (50) provided on the base plate (2) so as to be opposed to the magnet unit (51) to form a linear motor (5). The base plate (2) and the table plate (4) are each made of a material having a coefficient of linear expansion of 11×10⁻⁶ (1/° C.) or less, and a difference is provided between the coefficients of linear expansion of the base plate (2) and the table plate (4).

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First Claim