REAL TIME LIQUID PARTICLE COUNTER (LPC) END POINT DETECTION SYSTEM
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United States of America Patent
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Issued Date -
Aug 30, 2012
app pub date -
Feb 24, 2011
filing date -
Feb 24, 2011
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Embodiments of the present invention generally relate to a method and apparatus for ex-situ cleaning of a chamber component. More particularly, embodiments of the present invention generally relate to a method and apparatus for endpoint detection during ex-situ cleaning of a chamber component used in a semiconductor processing chamber. In one embodiment, a system for cleaning parts disposed in a liner with a cleaning fluid is provided. The system comprises a portable cart, a liquid particle counter (LPC) carried by the portable cart, the LPC configured for detachable coupling to a fluid outlet port formed through the liner, the LPC operable to sample rinsate solution exiting the line, and a pump carried by the portable cart and configured for fluid coupling to the liner in a detachable manner, the pump operable to recirculate rinsate solution through the liner.
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