APPARATUS AND METHOD FOR PURGING AND RECHARGING EXCIMER LASER GASES
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United States of America Patent
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Issued Date -
Aug 30, 2012
app pub date -
Nov 1, 2011
filing date -
Aug 5, 2005
priority date (Note) -
Abandoned
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Abstract
A method of recharging an excimer laser Includes opening an outlet in a chamber containing spent laser gas at a first pressure, opening an inlet in the chamber, the inlet in communication with a laser gas container at a second pressure higher than the first pressure, and flowing fresh laser gas into the chamber and removing at least a portion of the spent laser gases from the chamber without using a vacuum pump.
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