Dense arrays and charge storage devices

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United States of America Patent

PATENT NO 8981457
APP PUB NO 20120223380A1
SERIAL NO

13468731

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Abstract

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There is provided a monolithic three dimensional array of charge storage devices which includes a plurality of device levels, wherein at least one surface between two successive device levels is planarized by chemical mechanical polishing.

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Patent Owner(s)

Patent OwnerAddress
WODEN TECHNOLOGIES INC251 LITTLE FALLS DRIVE WILMINGTON DE 19808

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cleeves, James M Redwood City, US 132 7898
Farmwald, Paul Michael Portola Valley, US 17 2748
Johnson, Mark G Los Altos, US 64 7721
Kouznetzov, Igor G Santa Clara, US 8 1294
Lee, Thomas H Cupertino, US 90 7474
Subramanian, Vivek Redwood City, US 102 7010

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