METHODS FOR INCREASING BOTTOM ELECTRODE PERFORMANCE IN CARBON-BASED MEMORY DEVICES

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United States of America Patent

APP PUB NO 20120223414A1
SERIAL NO

13204772

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Abstract

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In some aspects, a method of forming a reversible resistance-switching metal-insulator-metal (“MIM”) stack is provided, the method including: forming a first conducting layer comprising a titanium nitride material having between about 50% Ti and about 95% Ti, forming a carbon nano-tube (CNT) material above the first conducting layer, forming a second conducting layer above the CNT material, and etching the first conducting layer, CNT material and second conducting layer to form the MIM stack. Numerous other aspects are provided.

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Patent Owner(s)

Patent OwnerAddress
SANDISK TECHNOLOGIES LLC5080 SPECTRUM DRIVE SUITE 1050W ADDISON TX 75001

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ping, Er-Xuan Fremont, US 221 2986
Schricker, April D Palo Alto, US 25 575

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