Optical components for use in measuring projection lens distortion or focus of an optical imaging system that images a substrate
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United States of America Patent
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N/A
Issued Date -
Sep 6, 2012
app pub date -
Dec 9, 2011
filing date -
Dec 10, 2010
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
New and useful optical components are provided, for use in measuring projection lens characteristics of an optical imaging system that images a substrate. The optical components comprise an array of full NA imagers located at the substrate plane, and a relay system for imaging the imagers to a detector that is remote from the substrate.
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