Importance

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Abstract

A fine pitch wire grid polarizer can have a pitch of less than 80 nanometers and a protective layer on the wires, by anisotropically etching the wire grid polarizer to form two parallel, elongated rods substantially located at corners where the wires contacted the substrate. The rods can be polarizing elements. A wire grid polarizer can have a repeated pattern of groups of parallel elongated wires disposed over a substrate. Each group of elongated wires comprises at least three wires. At least one wire at an interior of each group can be taller by more than about 10 nm than outermost wires of each group. Wires of a wire grid polarizer can be a byproduct of an etch reaction. A multi-step wire grid polarizer can comprise a base with a plurality of parallel multi-step ribs disposed on the base and a coating disposed along vertical surfaces of the steps.

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First Claim