Ozone gas supply system
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United States of America Patent
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Jul 15, 2014
Grant Date -
Oct 4, 2012
app pub date -
Sep 6, 2010
filing date -
Nov 26, 2009
priority date (Note) -
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Abstract
An ozone gas output flow rate management unit configured to receive a plurality of ozone gas outputs from a plurality of ozone generation units and capable of performing an ozone gas output flow rate control for selectively outputting one or a combination of two or more of the plurality of ozone gas outputs to any of a plurality of ozone treatment apparatuses by performing an opening/closing operation of a plurality of ozone gas control valves provided in the ozone gas output flow rate management unit.
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